SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

A manufacturing method of a semiconductor device forms a through electrode structure passing through a substrate partially. A part of the through electrode structure is exposed by removing the substrate partially. A protection film which includes a photosensitive organic insulating material and cove...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM, HYE REUN, LEE, DONG JUN, CHOI, JUNG SIK, HAN, JUN WON, HAN, HOON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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