TRANSFER ROBOT HAVING MULTIPLE ARM

The present invention relates to a transfer robot having multiple arms. More specifically, the transfer robot having multiple arms is capable of individually operating the multiple arms and of simultaneously stacking and dispensing an object to be transferred (a substrate, a wafer, or the like) whic...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	JUNG, ILL YOUNG, KIM, MIN HO, SEO, MIN SEOK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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