TRANSFER ROBOT HAVING MULTIPLE ARM

The present invention relates to a transfer robot having multiple arms. More specifically, the transfer robot having multiple arms is capable of individually operating the multiple arms and of simultaneously stacking and dispensing an object to be transferred (a substrate, a wafer, or the like) whic...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JUNG, ILL YOUNG, KIM, MIN HO, SEO, MIN SEOK
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention relates to a transfer robot having multiple arms. More specifically, the transfer robot having multiple arms is capable of individually operating the multiple arms and of simultaneously stacking and dispensing an object to be transferred (a substrate, a wafer, or the like) which is vertically loaded at a predetermined pitch unit. The transfer robot according to the present invention includes: a first to a fourth hand respectively transferring the object to be transferred; and a first to a fourth robot arm having the same movement path and arranged as a rectangular shape. The objects to be transferred simultaneously or individually are dispensed, transferred, or stacked from one same position to another same position by the first to the fourth robot arm to simultaneously transfer a plurality of the objects in order to reduce a tact time.