SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COMPUTER-READABLE STORAGE MEDIUM RECORDING THEREIN SUBSTRATE PROCESSING PROGRAM

The present invention is provided to improve a throughput in processing a substrate and to reduce a running cost thereof. A substrate processing apparatus (1) that processes a substrate (3) with a processing liquid and dries the substrate (3) includes: a substrate rotating device (22) configured to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OOISHI KOTARO, KAWANO HISASHI, TANAKA SATORU, KAWABUCHI YOSUKE, SUZUKI HIROYUKI, YOSHIDA YUKI, SHINOHARA KAZUYOSHI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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