ORGANIC MOLECULAR FILM FORMING APPARATUS AND ORGANIC MOLECULAR FILM FORMING METHOD

Provided are an organic molecular film forming apparatus and an organic molecular film forming method allowing the kinds of a processing target object to be variously selected and the shape of a film surface to be variously formed. The organic molecular film forming apparatus (100) forming an organi...

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Bibliographische Detailangaben
Hauptverfasser: SHIBUYA SETSUKO, FUSE TAKASHI
Format: Patent
Sprache:eng ; kor
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Zusammenfassung:Provided are an organic molecular film forming apparatus and an organic molecular film forming method allowing the kinds of a processing target object to be variously selected and the shape of a film surface to be variously formed. The organic molecular film forming apparatus (100) forming an organic molecular film on a processing target object includes: a processing chamber (11) that accommodates a processing target object therein; an organic material gas supplying unit (2) that supplies an organic material gas into the processing chamber (11); and an ultraviolet ray irradiating unit (13) that irradiates ultraviolet ray to at least one among the processing target object, the organic material gas supplied to the processing target object, and a film formed on the surface of the processing target object. At least one among the surface of the processing target object and the organic molecular film formed thereon is activated by irradiating the ultraviolet ray from the ultraviolet ray irradiating unit (13) to at least one among the processing target object, the organic material gas supplied to the processing target object, and the film formed on the processing target object.