MOUNTING APPARATUS FOR INSPECTING OF SEMICONDUCTOR

The present invention relates to a camera mounting apparatus for inspecting a semiconductor. More specifically, the camera mounting apparatus according to the present invention comprises: a support member; a first shaft member which is fixed on the support member and elongated along an x-axis direct...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	CHOI, HAK BUM
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM BLASTING CINEMATOGRAPHY ELECTROGRAPHY ENGINEERING ELEMENTS AND UNITS FRAMES, CASINGS, OR BEDS OF ENGINES OR OTHER MACHINES ORAPPARATUS NOT SPECIFIC TO AN ENGINE, MACHINE, OR APPARATUSPROVIDED FOR ELSEWHERE GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HOLOGRAPHY LIGHTING MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES MECHANICAL ENGINEERING PHOTOGRAPHY PHYSICS STANDS OR SUPPORTS TESTING THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	The present invention relates to a camera mounting apparatus for inspecting a semiconductor. More specifically, the camera mounting apparatus according to the present invention comprises: a support member; a first shaft member which is fixed on the support member and elongated along an x-axis direction; a first member which rotates around the first shaft member; a second shaft member which is fixed on the first member and elongated along a y-axis direction; a second member which rotates and moves around the second shaft member; and a third member which is arranged on the second member and fixed to rotate around a central axis in a z-axis direction, wherein the third member includes a camera holding unit on which a camera for inspecting a semiconductor is fixed. According to the present invention, the camera, which is mounted, is sequentially rotated around central axes in x-axis, y-axis, and z-axis directions, such that an angle of the camera is finely and easily adjusted.