SUBSTRATE PROCESSING DEVICE

A substrate processing device is disclosed. The disclosed substrate processing device comprises: a cassette unit which includes a cassette part where substrates are separately stacked; a transferring unit which transfers the substrate or the cassette part; a reversing unit which reverses the substra...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	PARK, JI HO, LEE, JEON KEUN, LEE, HYUN JAE, KIM, HYE JIN, SONG, JIN YEONG, KIM, TAE HOON, ZHANG, HANG, LM, YUL KYU, MO, SUNG WON, JUNG, SEOK JUN, CHOI, MUN SUP, LEE, SEUNG HOON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING HANDLING THIN OR FILAMENTARY MATERIAL NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A substrate processing device is disclosed. The disclosed substrate processing device comprises: a cassette unit which includes a cassette part where substrates are separately stacked; a transferring unit which transfers the substrate or the cassette part; a reversing unit which reverses the substrate or the cassette part; and a processing unit which processes the substrate reversed by the reversing unit. The transferring unit comprises: a first transfer unit which transfers the substrate or the cassette part between the cassette unit and the reversing unit; and a second transfer unit which transfers the substrate between the reversing unit and the processing unit.