COATING DEVICE AND COATING METHOD

Provided are a coating device and a coating method. The coating device according to an embodiment of the present invention comprises a supporting part for supporting a substrate; nozzle parts for coating the substrate with coating liquid; and a transfer part for moving the supporting part or the noz...

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Bibliographische Detailangaben
1. Verfasser:	YOO, SUNG HUNE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	Provided are a coating device and a coating method. The coating device according to an embodiment of the present invention comprises a supporting part for supporting a substrate; nozzle parts for coating the substrate with coating liquid; and a transfer part for moving the supporting part or the nozzle part in one direction, wherein the nozzle parts are arranged in parallel in one direction and include a plurality of nozzles for discharging the coating liquid.