SUBSTRATE HOLDING APPARATUS AND METHOD

A substrate fixing device and a method are provided. The substrate fixing device according to an embodiment of the present invention comprises a stage on which a substrate is mounted and at least one lift bar for lifting upward the substrate to separate the substrate from the stage, or lifting downw...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	YOO, SUNG HUNE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CORRECTION OF TYPOGRAPHICAL ERRORS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL STAMPS TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	A substrate fixing device and a method are provided. The substrate fixing device according to an embodiment of the present invention comprises a stage on which a substrate is mounted and at least one lift bar for lifting upward the substrate to separate the substrate from the stage, or lifting downward the substrate to mount the substrate on the stage. The lift bar comprises a body part and a head part connected to one end of the body part, being in contact with the substrate, and formed of a porous substance.