ELECTRO STATIC CHUCK HAVING EXCELLENT THERMAL SHOCK RESISTANCE AND METHOD FOR MANUFACTURING THE SAME

The present invention relates to an electro static chuck and a manufacturing method thereof and, more specifically, to an electro static chuck, which includes a parent metal made of Ni-Fe-Co alloy and a dielectric layer formed on one side of the parent metal and has excellent thermal shock resistanc...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, SE JONG, LEE, KWANG SEOK, BYON, EUNG SUN, LEE, JUNG HWAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ALLOYS BASIC ELECTRIC ELEMENTS CHEMISTRY COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FERROUS OR NON-FERROUS ALLOYS GENERATION MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Beschreibung
Zusammenfassung:	The present invention relates to an electro static chuck and a manufacturing method thereof and, more specifically, to an electro static chuck, which includes a parent metal made of Ni-Fe-Co alloy and a dielectric layer formed on one side of the parent metal and has excellent thermal shock resistance, and to a manufacturing method thereof. The electro static chuck comprises a parent metal made of Ni-Fe-Co alloy, a first dielectric layer formed on the parent metal, an electrode layer formed on the first dielectric layer, and a second dielectric layer formed on the electrode layer. The electro static chuck according to the present invention shows excellent thermal shock resistance by maintaining the consistency of the parent metal with a dielectric layer made of Al2O3 even if thermal shock caused by repeatedly heating and cooling the parent metal is applied to the parent metal, and therefore keeps the integrity of the dielectric layer to secure excellent thermal shock resistance. Hence, the electro static chuck according to the present invention is effectively used as a tunable electro static chuck (tunable-ESC) capable of maximizing the efficiency of an ultrafine pattern process by supporting a Si wafer in etching and deposition processes performed under various process conditions.