GUIDE PLATE FOR PROBE CARD

The present invention is to provide a guide plate for a probe card which can correspond to finer and narrower pitches of a through-hole by promoting the mechanical strength improvement of an edge portion of the through-hole. The guide plate (100) for a probe card comprises: a silicon substrate (110)...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIRAISHI AKINORI, FUJIHARA KOSUKE, KIMURA TEPPEI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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