GUIDE PLATE FOR PROBE CARD

The present invention is to provide a guide plate for a probe card which can correspond to finer and narrower pitches of a through-hole by promoting the mechanical strength improvement of an edge portion of the through-hole. The guide plate (100) for a probe card comprises: a silicon substrate (110)...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SHIRAISHI AKINORI, FUJIHARA KOSUKE, KIMURA TEPPEI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The present invention is to provide a guide plate for a probe card which can correspond to finer and narrower pitches of a through-hole by promoting the mechanical strength improvement of an edge portion of the through-hole. The guide plate (100) for a probe card comprises: a silicon substrate (110) including a through-hole (111) for guiding a probe (200); an edge portion (113a, 113b) constituted by the inner surface (112) of the through-hole (111) and the surface (110a, 110b) of the silicon substrate (110); and a curved-face part (112a, 112b) constituted by silicon oxide film formed on the edge portion (113a, 113b).