METHOD AND STRUCTURE FOR REDUCING CRACKS IN A DIELECTRIC LAYER IN CONTACT WITH METAL

A method and structure for reducing cracks in a dielectric in contact with a metal structure. The metal structure comprises a first metal layer; a second metal layer disposed on, and in contact with the first metal layer, the second metal layer being stiffer than the first metal layer; a third metal...

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Bibliographische Detailangaben
Hauptverfasser: LILES BARRY J, WHELAN COLIN S
Format: Patent
Sprache:eng ; kor
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