LED LAMP MOUDLE, EXPOSURE APPARATUS INCLUDING THE SAME AND DIRVING METHOD FOR EXPOSURE APPARATUS

A substrate exposure apparatus is disclosed. More specifically, the present invention relates to a lamp module which stability maintains the operation of the lamp module including a plurality of LED elements and facilitates replacement work when a lamp is broken, an exposure apparatus including the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KIM, JAE KWANG, LEE, SANG SEOK, OH, YOUNG KYO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BLASTING CINEMATOGRAPHY ELECTROGRAPHY FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMSTHEREOF HEATING HOLOGRAPHY LIGHTING MATERIALS THEREFOR MECHANICAL ENGINEERING NON-PORTABLE LIGHTING DEVICES ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHERARTICLES, NOT OTHERWISE PROVIDED FOR SYSTEMS THEREOF VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLEEXTERIORS WEAPONS
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Beschreibung
Zusammenfassung:	A substrate exposure apparatus is disclosed. More specifically, the present invention relates to a lamp module which stability maintains the operation of the lamp module including a plurality of LED elements and facilitates replacement work when a lamp is broken, an exposure apparatus including the same, and a driving method of the exposure apparatus. According to an embodiment of the present invention, the exposure apparatus including a LED lamp module comprises: a light source unit which includes a light source supply unit and supplies light in the ultraviolet region to a mask; a lens unit for transferring the light passed through the mask to a desired position of a substrate at a constant magnification; and an alignment unit including a chuck for supporting the mask and a stage for aligning the chuck at a desired location. The maintenance and repairement of the exposure apparatus can be facilitated by controlling illuminance and temperature of a LED element by a LED array unit mounted in the LED lamp module and a control unit for controlling the operation of a cooling unit.