AN APPARATUS FOR GROWING A SINGLE CRYSTAL INGOT
An embodiment comprises: a chamber having a view port; a crucible located in the chamber and occupying melting solution which is a monocrystalline raw material; a heat shield located in the top of the crucible; a rod combined on bottom end of the heat shield to measure a melt gap which is a distance...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng ; kor |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | An embodiment comprises: a chamber having a view port; a crucible located in the chamber and occupying melting solution which is a monocrystalline raw material; a heat shield located in the top of the crucible; a rod combined on bottom end of the heat shield to measure a melt gap which is a distance between the heat shield and the melting solution and arranged on the melting solution occupied in the crucible; and an image photographing part located in the top part of the view port and photographing an image about shadow of the rod formed on the rod and the surface of the melting solution through the view port, wherein the rod comprises: a fixing part including a first part which combines with the bottom part of the heat shield and a second part bended from the first part; and an indicating part having an intaglio or embossment shape on one end and combining other ends with the second part of the fixing part. |
---|