ETCHING APPARATUS OF SUBSTRATE AND METHOD OF ETCHING USING THE SAME

A liquid crystal display device comprises a receiving container which receives a substrate and includes a through hole on the bottom thereof, through which etchant is discharged, and four sidewalls for containing the etchant; and a first spray unit which is arranged on the upper side of the receivin...

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Bibliographische Detailangaben
Hauptverfasser: SHIN, MIN KYU, PARK, PYOUNG KYU, PARK, WOO YOUL, YOO, HAE YOUNG, SHIN, JUNG KUN
Format: Patent
Sprache:eng ; kor
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