CIRCUIT WIDTH THINNING DEFECT PREVENTION DEVICE AND METHOD OF PREVENTING CIRCUIT WIDTH THINNING DEFECT

The present invention relates to a device for preventing a circuit width thinning defect and a method for preventing the circuit width thinning defect. The device for preventing the circuit width thinning defect comprises: a storing means for storing pieces of dam design information divided according to a kind of a weak portion; an analyzing means for analyzing first design information and deriving a kind of the weak portion and a location of the weak portion; a matching means for extracting dam design information, which corresponds to the kind of the weak portion derived by the analyzing means, from the pieces of the dam design information stored in the storing means; and a changing means for changing the first design information such that a dam according to the dam design information extracted by the matching means is added to the location of the weak portion derived by the analyzing means. It is possible to prevent the circuit width thinning defect which reduces the circuit width due to excessive etching on a specific point.