APPARATUS OF THIN LAYER DEPOSITION AND METHOD OF MONITORING SHEET RESISTANCE OF THIN LAYER USING THE SAME

APPARATUS OF THIN LAYER DEPOSITION AND METHOD OF MONITORING SHEET RESISTANCE OF THIN LAYER USING THE SAME

Disclosed are a thin film deposition device capable of monitoring the sheet resistance of a conductive thin film by measuring electrical resistance in real time using a sample for measuring electrical resistance, which is composed of a dumpy substrate and a conductive pad formed on both edges of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, HEUNG GON, LEE, HYUNG KEUN, LEE, JAE SEUNG
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Disclosed are a thin film deposition device capable of monitoring the sheet resistance of a conductive thin film by measuring electrical resistance in real time using a sample for measuring electrical resistance, which is composed of a dumpy substrate and a conductive pad formed on both edges of the dummy substrate, as a sheet resistance measuring unit for measuring the sheet resistance of the conductive thin film, and a thin film sheet resistance monitoring method of the thin film deposition device.