A METHOD FOR PREPARING MONO-SILANE BY USING TRIALKOXYSILANE

The present invention relates to a production method of monosilane, and more specifically, to an economic production method of monosilane which produces the monosilane with high purity and high yield using trialkoxysilane, thereby practically using the monosilane for the composition of a thin semico...

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Bibliographische Detailangaben

Hauptverfasser:	SALIKHOV SHAVKAT, ASHUROVA KHEKAYAT, KIM, DEOK YUN, ASHUROV RUSTAM, KIM, TAEK JOONG, KIM, YONG IL, KURBANOV AZIZ, AZIZOV SULTAN, KIM, KYUNG YEOL, ASHUROV KHATAM, ABDISAIDOV ILYOS, ROTSHTEYN VLADIMIR
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
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