HEATER ASSEMBLY FOR CRYSTAL GROWTH APPARATUS

Systems and methods are provided to promote uniform thermal environment to feedstock material (e.g., silicon) in a crucible of a crystal growth apparatus are provided herein. More specifically, a heating system may be arranged in the crystal growth apparatus so as to include at least a first and sec...

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Bibliographische Detailangaben
Hauptverfasser: RAGHAVAN PARTHASARATHY SANTHANA, CHARTIER CARL, ANDRUKHIV ANDRE, RAVI BHUVARAGASAMY G, LACKEY DAVE
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:Systems and methods are provided to promote uniform thermal environment to feedstock material (e.g., silicon) in a crucible of a crystal growth apparatus are provided herein. More specifically, a heating system may be arranged in the crystal growth apparatus so as to include at least a first and second heating element which are configured to distribute heat axisymmetrically to the feedstock material and the second heating element that is configured to distribute heat symmetrically to the feedstock material to thereby provide uniform heat distribution to the feedstock material in the crucible to allow for increased consistency in crystal ingot quality.