THE NOZZLE

Provided is a nozzle for spraying a fluid on a substrate and a substrate processing apparatus having the same. The nozzle comprises: a nozzle body having a fluid passage formed by a combination of a first body and a second body; and a connecting unit having a first connecting member for combining th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	KIM, KEE WOONG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS NOZZLES OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING
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Beschreibung
Zusammenfassung:	Provided is a nozzle for spraying a fluid on a substrate and a substrate processing apparatus having the same. The nozzle comprises: a nozzle body having a fluid passage formed by a combination of a first body and a second body; and a connecting unit having a first connecting member for combining the first body and the second body, wherein the fluid passage includes a supply passage that receives a fluid from the outside, a first buffer where the fluid is temporarily stored, a second buffer where the fluid is temporarily stored, and a discharge passage that discharges the fluid to the outside, wherein the first connecting member is provided to pass through the first buffer or the second buffer. According to the present invention, the nozzle improves uniformity of discharged amount of the fluid.