SUBSTRATE INSPECTION APPARATUS AND METHOD WITH HIGH RESOLUTION

The present invention relates to a substrate inspection apparatus with high resolution and an inspection method thereof which can realize highly improved resolution and deep depth even using the conventional lens at low costs as it is. The substrate inspection apparatus with high resolution comprise...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIN, SANG HOON, HWANG, JAE HAK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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