GAS SUPPLYING UNIT FOR SUPPLYING MULTIPLE GASES AND METHOD FOR MANUFACTURING SAID GAS SUPPLYING UNIT

GAS SUPPLYING UNIT FOR SUPPLYING MULTIPLE GASES AND METHOD FOR MANUFACTURING SAID GAS SUPPLYING UNIT

The present invention relates to a gas supply part for supplying multiple gases. According to an embodiment of the present invention, the gas supply part supplies multiple gases; includes one or more inner pipes on or inside an outer pipe; injects a first processing gas which is supplied to the inne...

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Hauptverfasser: YEON, SE HUN, KIM, DONG JEE, LEE, YOO JIN
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator YEON, SE HUN
KIM, DONG JEE
LEE, YOO JIN
description The present invention relates to a gas supply part for supplying multiple gases. According to an embodiment of the present invention, the gas supply part supplies multiple gases; includes one or more inner pipes on or inside an outer pipe; injects a first processing gas which is supplied to the inner pipe through multiple first gas nozzles to the outside of the outer pipe; and injects a second processing gas which is supplied to the outer pipe through a multiple second gas nozzles to the outside of the outer gas.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title GAS SUPPLYING UNIT FOR SUPPLYING MULTIPLE GASES AND METHOD FOR MANUFACTURING SAID GAS SUPPLYING UNIT
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