GAS SUPPLYING UNIT FOR SUPPLYING MULTIPLE GASES AND METHOD FOR MANUFACTURING SAID GAS SUPPLYING UNIT

The present invention relates to a gas supply part for supplying multiple gases. According to an embodiment of the present invention, the gas supply part supplies multiple gases; includes one or more inner pipes on or inside an outer pipe; injects a first processing gas which is supplied to the inne...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	YEON, SE HUN, KIM, DONG JEE, LEE, YOO JIN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	The present invention relates to a gas supply part for supplying multiple gases. According to an embodiment of the present invention, the gas supply part supplies multiple gases; includes one or more inner pipes on or inside an outer pipe; injects a first processing gas which is supplied to the inner pipe through multiple first gas nozzles to the outside of the outer pipe; and injects a second processing gas which is supplied to the outer pipe through a multiple second gas nozzles to the outside of the outer gas.