CROSS TRANSFERRING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS AND IN-LINE SYSTEM HAVING THE SAME

CROSS TRANSFERRING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS AND IN-LINE SYSTEM HAVING THE SAME

The present invention relates to a semiconductor manufacturing apparatus and, especially, to a display manufacturing apparatus, which includes: a vacuum processing space comprising one side port and the other side port which are facing each other; a first transfer path delivering a first member to t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: BANG, JUNG MIN, ANH, SUNG IL, LEE, BYUNG WOO
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Beschreibung
Zusammenfassung:The present invention relates to a semiconductor manufacturing apparatus and, especially, to a display manufacturing apparatus, which includes: a vacuum processing space comprising one side port and the other side port which are facing each other; a first transfer path delivering a first member to the other side port by being inserted from the one side port; a second transfer path delivering a second member inserted from the other side port to the one side port via a branch node; and a cross transfer which is located at the branch node, and transfers a third member to a third transfer path corresponding to the cross direction as to the second transfer path by separating the third member from the second member.