WAFER ETCHING APPARATUS FOR MANUFACTURING SOLAR CELL

The present invention relates to a substrate etching device for manufacturing solar cells and includes a bath which accommodates the etching chemical; and multiple rollers which are placed inside the bath, transfer a substrate in a certain direction, and apply the etching chemical on the bottom surf...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WI, IL HWAN, WOO, SUNG HOON, KANG, JIN MO, KIM, JI HYUN, KIM, YEON KYUNG, YANG, SU MI, KIM, MYUN SU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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