HEAT TREATMENTING DEVICE

PURPOSE: A heat treatment device is provided to prevent the generation of a drying smear on a coating layer by maintaining uniform temperature on the surface of a substrate. CONSTITUTION: Vibration plates (2) are arranged in a substrate transfer direction (W). An ultrasonic generating part (4) appli...

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Bibliographische Detailangaben
1. Verfasser:	MIYAJIMA YUYA
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PURPOSE: A heat treatment device is provided to prevent the generation of a drying smear on a coating layer by maintaining uniform temperature on the surface of a substrate. CONSTITUTION: Vibration plates (2) are arranged in a substrate transfer direction (W). An ultrasonic generating part (4) applies ultrasonic vibration to each vibration plate. The ultrasonic generating part includes an ultrasonic oscillator (41) and a horn (42). A temperature controlling part (3) controls the temperature of the vibration plate part. A gas floating part (6) is floated by the injection of a gas. A transfer part (5) includes a hand (51) and a reciprocating tool (52).