METHOD AND APPARATUS FOR DETECTING PATTERN DEFECTS

PURPOSE: A pattern defect detection method and an apparatus thereof obtains a minimum distance between a reference pattern and a test pattern by using a pre-generated distance map, detecting a fault of a pattern according to a user's request. CONSTITUTION: A pattern form having extraction of an...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	LEE, HWAL SUK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!