SURFACE TREATMENT AGENT AND SURFACE TREATMENT METHOD

PURPOSE: A surface treating agent and a surface treating method using the same are provided to prevent the fall of a pattern and to reduce a force between the patterns in a drying process. CONSTITUTION: A surface treating contains a compound which is indicated as a first formula (1) or a second form...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	OHHASHI TAKUYA, SUGAWARA MAI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ADHESIVES APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL PAINT OR INK REMOVERS CHEMISTRY CINEMATOGRAPHY COATING COMPOSITIONS, e.g. PAINTS, VARNISHES ORLACQUERS CORRECTING FLUIDS DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FILLING PASTES HOLOGRAPHY INKS MATERIALS THEREFOR METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS ORIGINALS THEREFOR PAINTS PASTES OR SOLIDS FOR COLOURING OR PRINTING PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS POLISHES SEMICONDUCTOR DEVICES USE OF MATERIALS THEREFOR WOODSTAINS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PURPOSE: A surface treating agent and a surface treating method using the same are provided to prevent the fall of a pattern and to reduce a force between the patterns in a drying process. CONSTITUTION: A surface treating contains a compound which is indicated as a first formula (1) or a second formula (2). The first formula is R^1aSi[N(CH3)2]4-a. The second formula is R^2b[N(CH3)2]3-bSi-R^4-SiR$3c[N(CH3)2]3-c. R^1 is the chain aliphatic hydrocarbon group of the carbon number 1-18. a is 1 or 2. b and c are 1. R^4 is a chain alkylene group. R^2 and R^3 are a hydrogen atom or a methyl group.