SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD AND STORAGE MEDIUM

PURPOSE: A substrate transferring apparatus, a substrate transferring method, and a memory medium are provided to precisely transfer a substrate to a module by reducing the number of receiving units and light sources. CONSTITUTION: A transfer arm (30) transfers a wafer. A notch is formed on the peri...

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Bibliographische Detailangaben
Hauptverfasser:	MAEJIMA HIROMITSU, HAYASHI TOKUTAROU, DOUKI YUICHI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS REGULATING SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: A substrate transferring apparatus, a substrate transferring method, and a memory medium are provided to precisely transfer a substrate to a module by reducing the number of receiving units and light sources. CONSTITUTION: A transfer arm (30) transfers a wafer. A notch is formed on the peripheral part of the wafer. A housing receives a module. The wafer is transferred to the module through a transfer hole (12). A plurality of heating modules (21) heat the wafer.