METHOD OF PALLADIUM NANOWIRE HYDROGEN SENSOR USING DOUBLE ECHING AND A SENSOR THEREOF

PURPOSE: A method for manufacturing a palladium nano wire hydrogen sensor using double etching and the palladium nano wire hydrogen sensor using the same are provided to increase reliability with constant resistance of a number of palladium nano wires, by attaching the linear and straight nano wire to a substrate stably by manufacturing a metal pattern accurately. CONSTITUTION: According to a method for manufacturing a palladium nano wire hydrogen sensor using double etching, a conductive metal is formed on the surface of a substrate (S1). A photoresist pattern is formed with a photoresist material on a part of the conductive metal (S2). The conductive metal which is not exposed because the photoresist pattern is not formed is dry-etched (S3). A metal pattern is formed in the lower part of the photoresist pattern by dry-etching of a part of the conductive metal covered by the photoresist pattern (S4). The metal pattern is plated with palladium (S5). A palladium nano wire is formed by removing the photoresist pattern and the metal pattern (S6). An external electrode connected to the palladium nano wire is formed (S7). [Reference numerals] (AA) Start; (BB) End; (S1) Coating conductive metal on the surface of a substrate; (S2) Forming photoresist pattern with a photoresist material on a part of the conductive metal; (S3) Etching the exposed conductive metal through dry etching; (S4) Forming a metal pattern by excessive etching with wet-etching; (S5) Forming a palladium nano wire by plating with palladium; (S6) Removing the photoresist pattern and the metal pattern; (S7) Forming an external electrode connected to the palladium nano wire