MULTI PARALLEL CONFOCAL SYSTEME AND SURFACE MEASUREMENT METHOD USING THIS

PURPOSE: A multi parallel confocal system is provided to reduce contamination and damage of the surface of an inspection target and the surface of a lens, by lengthening working distance of a measured object of a micro lens array. CONSTITUTION: A multi parallel confocal system includes a light source, a relay lens part (102), an optical probe (103) and a photo detector (106). The relay lens part includes more than one lens to transmit a light toward a measured object (105) or reflected from the measured object and to focus the light irradiated from the light source. The optical probe forms a micro lens array by arranging a number of micro lenses (104) where the light focused through the relay lens part is incident, and the light is focused on the surface of the measured object through the micro lens array. A photoelectric detector detects the light which is reflected from the measured object and is incident through the micro lens and the relay lens part. A back focus determined by focal distance of the micro lens and the distance between the micro lens and the measured object and the focus of the relay lens part are coplanar.