POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION

PURPOSE: A positive photosensitive resin composition is provided to be able to show an excellent cyclization rate by a low temperature curing reaction, and, therefore, to be able to manufacture a photosensitive resin film with an excellent mechanical property and insulation property. CONSTITUTION: A...

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Hauptverfasser: HWANG, EUN HA, LEE, JIN YOUNG, KIM, SANG KYEON, LEE, JUN HO, CHO, HYUN YONG, KWON, JI YUN, KIM, SANG SOO, LEE, JONG HWA, KIM, DAE YUN, YOON, EUN KYUNG, HONG, CHUNG BEOM
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creator HWANG, EUN HA
LEE, JIN YOUNG
KIM, SANG KYEON
LEE, JUN HO
CHO, HYUN YONG
KWON, JI YUN
KIM, SANG SOO
LEE, JONG HWA
KIM, DAE YUN
YOON, EUN KYUNG
HONG, CHUNG BEOM
description PURPOSE: A positive photosensitive resin composition is provided to be able to show an excellent cyclization rate by a low temperature curing reaction, and, therefore, to be able to manufacture a photosensitive resin film with an excellent mechanical property and insulation property. CONSTITUTION: A positive photosensitive resin composition comprises (A) alkali soluble resin selected from a polybenzoxazole precursor, and a polyimide precursor or their combination; (B) a photosensitive diazoquinone compound; (B) a thermoacid generator with a decomposition temperature of 150-200deg.C; and (D) a solvent. The polybenzoxazole precursor includes a repeating unit represented by Chemical formula 1, or both repeating units of Chemical formulas 1 and 2, and has a thermally polymerizable functional group on at least one terminal end.
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language eng ; kor
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
title POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION
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