SEMICONDUCTOR CHUCK TABLE CLEANING SYSTEM

SEMICONDUCTOR CHUCK TABLE CLEANING SYSTEM

PURPOSE: A semiconductor chuck table cleaning system is provided to automatically clean contaminants by using a static charge generator and a brush. CONSTITUTION: A static charge generator induces static charges from contaminants. The contaminants remain on the surface of a chuck table. The chuck ta...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HONG, SUNG BOK, KIM, BYUNG SOO, KIM, YOUNG MIN, KIM, YOUNG SIK, LEE, HYUNG JIN, KIM, GOON WOO
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE: A semiconductor chuck table cleaning system is provided to automatically clean contaminants by using a static charge generator and a brush. CONSTITUTION: A static charge generator induces static charges from contaminants. The contaminants remain on the surface of a chuck table. The chuck table mounts a wafer. A vacuum pressure generation system(30) inhales the contaminants by using vacuum pressure. A first direction transport unit(40) moves the static charge generator.