METHOD OF MANUFACTURING A GLASS SUBSTRATE FOR A SOLAR CELL AND SPUTTER

METHOD OF MANUFACTURING A GLASS SUBSTRATE FOR A SOLAR CELL AND SPUTTER

PURPOSE: A method for manufacturing a glass substrate for a solar cell and a sputtering apparatus are provided to improve the photoelectric conversion efficiency of a solar cell including a transparent conduction layer by controlling the angle of a target. CONSTITUTION: A target is mounted on a targ...

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Hauptverfasser: KIM, MIN BUM, SHIN, CHONG HOON, PARK, JIN JOO, YI, JUN SIN, BAEK, SEUNG SIN, JANG, JU YEON, PARK, HYEONG SIK, JUNG, JUN HEE
Format: Patent
Sprache:eng ; kor
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator KIM, MIN BUM
SHIN, CHONG HOON
PARK, JIN JOO
YI, JUN SIN
BAEK, SEUNG SIN
JANG, JU YEON
PARK, HYEONG SIK
JUNG, JUN HEE
description PURPOSE: A method for manufacturing a glass substrate for a solar cell and a sputtering apparatus are provided to improve the photoelectric conversion efficiency of a solar cell including a transparent conduction layer by controlling the angle of a target. CONSTITUTION: A target is mounted on a target support part positioned in a chamber(S110). A substrate is mounted on a susceptor positioned in the chamber(S130). A target angle between the target and the substrate is controlled(S150). A target material is deposited on the substrate to form a metal oxide layer having a texture(S170). [Reference numerals] (AA) Start; (BB) End; (S110) Mount a target; (S130) Mount a substrate on a susceptor; (S150) Control a target angle between the target and the substrate; (S170) Form a metal oxide layer having a texture
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title METHOD OF MANUFACTURING A GLASS SUBSTRATE FOR A SOLAR CELL AND SPUTTER
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