METHOD OF MANUFACTURING A GLASS SUBSTRATE FOR A SOLAR CELL AND SPUTTER

PURPOSE: A method for manufacturing a glass substrate for a solar cell and a sputtering apparatus are provided to improve the photoelectric conversion efficiency of a solar cell including a transparent conduction layer by controlling the angle of a target. CONSTITUTION: A target is mounted on a target support part positioned in a chamber(S110). A substrate is mounted on a susceptor positioned in the chamber(S130). A target angle between the target and the substrate is controlled(S150). A target material is deposited on the substrate to form a metal oxide layer having a texture(S170). [Reference numerals] (AA) Start; (BB) End; (S110) Mount a target; (S130) Mount a substrate on a susceptor; (S150) Control a target angle between the target and the substrate; (S170) Form a metal oxide layer having a texture