DIGITAL HOLOGRAPHIC MICROSCOPE FOR 3 DIMENTIONAL DEFECT INSPECTION OF DISPLAY SUBSTRATE AND INSPECTION METHOD USING THE SAME

PURPOSE: A digital holographic microscope and a defect inspection method using the same are provided to holograph the defect of a display substrate and to promptly measure the maximum height of the display substrate defect on the basis of the regeneration distance of a phase reconstructed image in w...

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Bibliographische Detailangaben

Hauptverfasser:	EOM, HYO SOON, YU, YOUNG HUN, HWANG, JAE HAK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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