DIGITAL HOLOGRAPHIC MICROSCOPE FOR 3 DIMENTIONAL DEFECT INSPECTION OF DISPLAY SUBSTRATE AND INSPECTION METHOD USING THE SAME

PURPOSE: A digital holographic microscope and a defect inspection method using the same are provided to holograph the defect of a display substrate and to promptly measure the maximum height of the display substrate defect on the basis of the regeneration distance of a phase reconstructed image in which phase-inversion exists. CONSTITUTION: A digital holographic microscope comprises an optical source unit(100), a reference light generator(200), an object light generator(300), a CCD(Charge Coupled Device)(400), and an operation unit(500). A reference light CCD records a hologram by uniting reference light and object light. The operation unit numerically analyzes interference fringes recorded. The operation unit obtains a plurality of phase reconstructed images at a predetermined regeneration distance interval from minimum regeneration distance to maximum regeneration distance with respect to the hologram recorded in the CCD; successively regenerates from the phase reconstructed image of the minimum regeneration distance; and measures the maximum height of the display substrate defect on the basis of the regeneration distance of the phase reconstructed image in which phase-inversion exists.