GAS FLOW MONITORING SYSTEM

PURPOSE: A gas flow monitoring system is provided to increase the reliability of the system by reinspecting with high accuracy when flow is abnormal. CONSTITUTION: A gas flow monitoring system comprises a first flow monitoring unit(2), a second flow monitoring unit(3), and a control part(4). The fir...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MORI YOJI, SHIROYAMA NAOYA, NAKADA AKIKO, ITO MINORU
Format: Patent
Sprache:eng ; kor
Schlagworte:
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