GAS FLOW MONITORING SYSTEM

PURPOSE: A gas flow monitoring system is provided to increase the reliability of the system by reinspecting with high accuracy when flow is abnormal. CONSTITUTION: A gas flow monitoring system comprises a first flow monitoring unit(2), a second flow monitoring unit(3), and a control part(4). The fir...

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Bibliographische Detailangaben
Hauptverfasser:	MORI YOJI, SHIROYAMA NAOYA, NAKADA AKIKO, ITO MINORU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BLASTING CONTROLLING GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEATING LIGHTING MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL MECHANICAL ENGINEERING METERING BY VOLUME PHYSICS PIPE-LINE SYSTEMS PIPE-LINES REGULATING STORING OF DISTRIBUTING GASES OR LIQUIDS SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TESTING WEAPONS
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Beschreibung
Zusammenfassung:	PURPOSE: A gas flow monitoring system is provided to increase the reliability of the system by reinspecting with high accuracy when flow is abnormal. CONSTITUTION: A gas flow monitoring system comprises a first flow monitoring unit(2), a second flow monitoring unit(3), and a control part(4). The first flow monitoring unit is arranged in an upstream passage of a flow controller of an arbitrary process gas line. The second flow monitoring unit is arranged in a discharge passage branched from an upstream passage of a process chamber. The control part makes the first flow monitoring unit normally monitor the flow of the flow controller and makes the second monitoring unit reinspect whether or not the flow controller is normal when the first flow monitoring unit multiply monitor the abnormal flow. [Reference numerals] (4) Control part; (5) Chamber; (6) Device; (AA) Gas A; (BB) Gas B; (CC) Gas C; (DD) Gas D; (EE) Exhaust;