SOLENOID BYPASS SYSTEM FOR CONTINUOUS OPERATION OF PNEUMATIC VALVE

PURPOSE: A solenoid bypass system for continuously operating a pneumatic valve is provided to continuously operate a process tool by providing a continuous flow of a pressurized inert gas. CONSTITUTION: A solenoid bypass system for continuously operating a pneumatic valve comprises a first unit, mul...

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Bibliographische Detailangaben
Hauptverfasser: BARTHOLD JEFFERY C, SMITH ANTHONY JOHN, DAX WILLIAM JOHN
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:PURPOSE: A solenoid bypass system for continuously operating a pneumatic valve is provided to continuously operate a process tool by providing a continuous flow of a pressurized inert gas. CONSTITUTION: A solenoid bypass system for continuously operating a pneumatic valve comprises a first unit, multiple solenoid valves(2), a manifold(4), and a control unit. The first unit supplies a pressurized inert gas. Each solenoid valve comprises an inner pressure port, an inner operator port, and an inner relief port. The inner pressure port controls whether or not the solenoid valve is in an energized state. The inner operator port communicates with the fluid of the inner pressure port and each pneumatic valve when a current flows in the solenoid valves. An outer pressure port connects the inner pressure ports, the inner operator ports, and the inner relief ports. The manifold comprises an outer relief port(8) communicating with the inner relief valves of the solenoid valves.