ROBOT, MOTHOD OF INSTALLING THE SAME, AND MANUFACTURING APPARATUS INCLUDING THE SAME

PURPOSE: A robot, a method for installing the robot, and a device for manufacturing the robot are provided to divide the robot into a plurality of units even though a spatial limitation exists, thereby facilitating the installment of the robot inside a chamber. CONSTITUTION: A robot comprises a firs...

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Bibliographische Detailangaben
Hauptverfasser: FURUKAWA NOBUYUKI, NOGUCHI TADATAKA, OHNI KENSUKE
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:PURPOSE: A robot, a method for installing the robot, and a device for manufacturing the robot are provided to divide the robot into a plurality of units even though a spatial limitation exists, thereby facilitating the installment of the robot inside a chamber. CONSTITUTION: A robot comprises a first unit(10) and a second unit. The first unit is entered into a chamber and simultaneously fixed to the chamber. The second unit is entered into a chamber and simultaneously connected to the first unit. The sum of the heights of the first and second units is larger than that of an insertion space of the upper part of the chamber. Each height of the first and second units is smaller than the insertion space.