METHOD OF MANUFACTURING FOR INDIUM TIN OXIDE TARGET THEREOF AND INDIUM TIN OXIDE TARGET BY USING THE SAME

PURPOSE: An ITO(Indium Tin Oxide) target and a manufacturing method thereof are provided to improve sintering quality by causing stable heating at high temperatures by using a hybrid heating source. CONSTITUTION: A manufacturing method of an ITO target comprises: a powder mixing step of wet-mixing I...

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Hauptverfasser:	PARK, HOON, PARK, HYUNG RYUL, PYO, SE HUN, KWON, SE HEE, LEE, EUN KYUNG, KANG, SU NAM, RYOO, JE CHOON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ARTIFICIAL STONE CASTING CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER METALLURGY PERFORMING OPERATIONS POWDER METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING TREATMENT OF NATURAL STONE WORKING METALLIC POWDER
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Beschreibung
Zusammenfassung:	PURPOSE: An ITO(Indium Tin Oxide) target and a manufacturing method thereof are provided to improve sintering quality by causing stable heating at high temperatures by using a hybrid heating source. CONSTITUTION: A manufacturing method of an ITO target comprises: a powder mixing step of wet-mixing In2O3 powder and SnO2 powder to form a granule powder; a molding step of molding the granule powder to form an ITO molded product; a sintering step of sintering the ITO molded product to form an ITO sintered product by using a hybrid heating source, which consists of microwaves and MoSi2 heating body, as a sintering heating source. The sintering step consists of a delipidating process and a sintering process. In the delipidating step, microwaves are used as a heating source and in the sintering process, MoSi2 heating body uses as a MoSi2 heating body. The delipidating process and the sintering process are continuously processed in a furnace where a microwave generator and the MoSi2 heating body are installed.