ULTRAVIOLET IRRADIATION DEVICE

PURPOSE: An ultraviolet ray irradiation device is provided to form an opening in a longitudinal direction of a ultraviolet lamp and the ultraviolet lamp into a cylinder shape so that gas efficiently circulates around the UV lamp. CONSTITUTION: An ultraviolet ray irradiation device comprises a ultrav...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KATAGIRI TSUYOSHI, HIROI KAZUNORI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CLEANING CLEANING IN GENERAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: An ultraviolet ray irradiation device is provided to form an opening in a longitudinal direction of a ultraviolet lamp and the ultraviolet lamp into a cylinder shape so that gas efficiently circulates around the UV lamp. CONSTITUTION: An ultraviolet ray irradiation device comprises a ultraviolet lamp(2), a casing(3), and a gas supply device(4). The ultraviolet lamp irradiates ultraviolet rays on a workpiece(W). The casing receives the ultraviolet lamp and comprises an opening(31) opened oppositely to the workpiece. The gas supply device supplies gas to the inside of the casing. A circulation guide surface(3x) is installed in an inner surface or an internal space of the casing. The gas supplied by the gas supply device circulates around the ultraviolet lamp in one direction through the circulation guide surface.