PROTECTION SEAL PLATE AND APPARATUS FOR MANUFACTURING ELECTRONIC COMPONENTS INCLUDING THE SAME

PROTECTION SEAL PLATE AND APPARATUS FOR MANUFACTURING ELECTRONIC COMPONENTS INCLUDING THE SAME

PURPOSE: A protection seal plate and an electronic component manufacturing apparatus including the same are provided to reduce process time by replacing an inner separation member when an outer sealing member is replaced. CONSTITUTION: A substrate of a chamber enters an entrance. A door plate(320) m...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CHO, CHAN HYUNG, LIM, JONG WHA
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE: A protection seal plate and an electronic component manufacturing apparatus including the same are provided to reduce process time by replacing an inner separation member when an outer sealing member is replaced. CONSTITUTION: A substrate of a chamber enters an entrance. A door plate(320) moves to the entrance to block the entrance from the outside. An inner separation member(330) firstly separates the inner space of the chamber from the outside. An outer sealing member(340) is mounted on the door plate and secondly seals the inner space.