APPARATUS AND METHOD FOR SEPARATING SUBSTRATE
PURPOSE: An apparatus and a method for separating a substrate are provided to remove a junction part for prevent the penetration of foreign materials. CONSTITUTION: A substrate support part(110) comprises a laminate. A laminated substrate is formed on a carrier member. A plate corner separating part...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng ; kor |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!