APPARATUS AND METHOD FOR SEPARATING SUBSTRATE

PURPOSE: An apparatus and a method for separating a substrate are provided to remove a junction part for prevent the penetration of foreign materials. CONSTITUTION: A substrate support part(110) comprises a laminate. A laminated substrate is formed on a carrier member. A plate corner separating part...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: JUNG, JOUNG SUL
Format: Patent
Sprache:eng ; kor
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