APPARATUS AND METHOD FOR SEPARATING SUBSTRATE

PURPOSE: An apparatus and a method for separating a substrate are provided to remove a junction part for prevent the penetration of foreign materials. CONSTITUTION: A substrate support part(110) comprises a laminate. A laminated substrate is formed on a carrier member. A plate corner separating part...

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Bibliographische Detailangaben
1. Verfasser:	JUNG, JOUNG SUL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PRINTED CIRCUITS STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: An apparatus and a method for separating a substrate are provided to remove a junction part for prevent the penetration of foreign materials. CONSTITUTION: A substrate support part(110) comprises a laminate. A laminated substrate is formed on a carrier member. A plate corner separating part(120) comprises a substrate cutting unit and a substrate bending unit. The substrate cutting unit cuts the laminated substrate edge portion of the laminate. The substrate bending unit forms a gap between the laminated substrate and carrier member. A substrate separation part(130) is inserted into a gap formed between the laminated substrate and carrier member. The substrate separation part separates the laminated substrate from carrier member. [Reference numerals] (125) Air storage unit; (127) Control part; (127a) First driving unit; (127b) Second driving unit; (127c) Third driving unit