APPARATUS AND METHOD FOR SEPARATING SUBSTRATE

PURPOSE: An apparatus and a method for separating a substrate are provided to remove a junction part for prevent the penetration of foreign materials. CONSTITUTION: A substrate support part(110) comprises a laminate. A laminated substrate is formed on a carrier member. A plate corner separating part...

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1. Verfasser: JUNG, JOUNG SUL
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creator JUNG, JOUNG SUL
description PURPOSE: An apparatus and a method for separating a substrate are provided to remove a junction part for prevent the penetration of foreign materials. CONSTITUTION: A substrate support part(110) comprises a laminate. A laminated substrate is formed on a carrier member. A plate corner separating part(120) comprises a substrate cutting unit and a substrate bending unit. The substrate cutting unit cuts the laminated substrate edge portion of the laminate. The substrate bending unit forms a gap between the laminated substrate and carrier member. A substrate separation part(130) is inserted into a gap formed between the laminated substrate and carrier member. The substrate separation part separates the laminated substrate from carrier member. [Reference numerals] (125) Air storage unit; (127) Control part; (127a) First driving unit; (127b) Second driving unit; (127c) Third driving unit
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language eng ; kor
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subjects ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS
CONVEYING
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PACKAGES
PACKAGING ELEMENTS
PACKING
PERFORMING OPERATIONS
PRINTED CIRCUITS
STORING
TRANSPORTING
title APPARATUS AND METHOD FOR SEPARATING SUBSTRATE
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