A PHOTORESIST COMPOSITION

PURPOSE: A photoresist composition is provided to improve the dissolution of a polymer resin, and the resolution, the development contrast, and the photosensitivity of a photoresist film by using a glutaraldehyde-based novolak resin. CONSTITUTION: A photoresist composition includes 5-30 weight% of a...

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Hauptverfasser: JUNG, KI HWA, PARK, IL KYU, JOO, SANG IL, PARK, JU KYUNG, HONG, WOO SUNG, KIM, SEUNG KI, KIM, BYUNG UK, HAHM, SUN MI, KIM, KYUNG HO, KIM, DONG MIN, LEE, DOO YOUN, JEA, GAL EUN, LEE, WON YOUNG, BYEON, JA HUN
Format: Patent
Sprache:eng ; kor
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Zusammenfassung:PURPOSE: A photoresist composition is provided to improve the dissolution of a polymer resin, and the resolution, the development contrast, and the photosensitivity of a photoresist film by using a glutaraldehyde-based novolak resin. CONSTITUTION: A photoresist composition includes 5-30 weight% of a novolak resin, 2-10 weight% of a diazide-based photosensitive compound, 0.1-10 weight% of a sensitivity enhancer, and remaining amount of an organic solvent. The novolak resin is the condensation polymer of a phenol compound and glutaraldehyde, and the weight average molecular weight of the novolak resin is in a range between 2,000 and 20,000. In the novolak resin, 2-50 parts by weight of the glutaraldehyde are used based on 100 parts by weight of the phenol compound. [Reference numerals] (AA) Embodiment 1; (BB) Embodiment 2; (CC) Embodiment 3; (DD) Comparative Embodiment 1; (EE) H/B = Skip; (FF) H/B = 130°C; (GG) H/B = 135°C