VACUUM CHUCK

PURPOSE: A vacuum chuck is provided to prevent arcing discharge at the upper side of a base by including a porous plate which is an insulator. CONSTITUTION: A processed substrate is settled on the upper side of a porous plate(10). A vacuum hole supports the processed substrate and lifts up the proce...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KANG, CHANG SU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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